TEXTBOOKS (EE8091)

1. Chang Liu, "Foundations of MEMS", Pearson Education Inc., 2006.

2. Stephen D Senturia, "Microsystem Design", Springer Publication, 2000.

3. Tai Ran Hsu, “MEMS & Micro systems Design and Manufacture” Tata McGraw Hill, New Delhi, 2002.

REFERENCES (EE8091)

1. James J. Allen, "Micro Electro Mechanical System Design", CRC Press Publisher, 2010.

2. Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim, "Micro Sensors MEMS and Smart Devices", John Wiley & Son LTD,2002.

3. Mohamed Gad-el-Hak, editor, “ The MEMS Handbook”, CRC press Baco Raton, 2000.

4. Nadim Maluf,“ An Introduction to Micro Electro Mechanical System Design”, Artech House, 2000.

5. Thomas M. Adams and Richard A. Layton, “Introduction MEMS, Fabrication and Application,” Springer 2012.